|
The meters are called "Non-contact displacement meter"
or "Thickness meter", and detect physical quantity, such
as displacement, vibration, and thickness, with non-contact probes, then convert to electrical quantity
and measure original physical quantity accurately. The sensor that
is integrated inside the probes detects the quantity. The methods are
capacitance, laser (heterodyne, interference), fiber optics etc. As every method has its own
characteristics, you can choose its usage. As measurements are performed using a
non-contact method, you can measure accurately without affecting
the object being tested.
Demands on the non-contact displacement meter have grown vastly
in recent years, such as semiconductors, precision motors, various
disks (such as hard disks and compact disks, etc), and various films, and both
meters have had to expand to meet those needs.
|