Application Examples of Displacement & Thickness Meters

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Application Field
Measurement Application Examples
Application of Displacement & Thickness Meters

1. Application Field

(1)	Measurement of axial vibration, radial vibration, circularity, vibration, and acceleration: precision motors, video cylinders, hard disks, compact disks, engines, and rollers for office appliances
(2)	Measurement of board thickness, flatness, warping, roughness, scratches, edges, and size: silicon wafers, various disks, glass, printed boards, films, and sheets
(3)	Measurement of accuracy positioning and size: semiconductor manufacturing machines, semiconductor manufacturing testers, processing machine for precision machines, machine parts assembling, XY stage, and liquid level
(4)	Measurement of vibration element oscillation, vibration times, vibration mode, and response characteristics: piezo-electric elements, crystal vibration, ultrasonic vibration, and speakers
(5)	Measurement of external dimension: wire/pipes, tapes/sheets, copy drums, rubber rollers, precision parts, and assembly parts

2. Measurement Application Examples

Measurement of radial vibration and axial vibration	Measurement of polygon mirror vibration

(Capacitance)	(Capacitance)

Measurement of gap	Measurement of piezo-electric element vibration

(Capacitance)	(Fiber optics)

Example of system application	Measurement of silicon wafer thickness

(Capacitance and laser)	(Capacitance)

Measurement of sheet thickness	Measurement of piezo-electric element displacement

(Capacitance)	(Heterodyne)

3. Application of Displacement & Thickness Meters

How to evaluate high speed and high precision motors (rotators)

e.g. Measurement of radial vibration and axial vibration

Do you have trouble evaluating high speed and high accuracy motors even though you made them?

RRO and NRRO measurement of high speed and high accuracy motors (rotators)
To evaluate the performance of motors (rotators such as HDD, FD, MO, DVD, VTR), it is necessary to measure the vibration of the direction of an arrow as shown below in the actual operation.
We have a large assortment of probes to measure accurately, even if the measurement objects are narrow or there are obstacles around the measurement objects.

Example 1 of advanced measurement

Example 2 of advanced measurement

RRO (Repeatable Runout) NRRO (Non-Repeatable Runout)

Construction example -- the case of measurement of axial --
When observing the rotator with 2 probes as shown, the Lissajous waveform can be seen. You can also see which way the axis vibrates, and the influence of the machine on the parts around the rotator, etc.

	This is a waveform when observed with an XY mode oscilloscope using 2 probes.

	It is an ideal measuring way.

Use good quality fixtures to get good performance out of the meters
To measure in high resolution, it is necessary to use high-resolution meters and good quality fixtures to enhance the meters' performance. Along with usability, a structure that can withstand of surrounding vibrations, or fixtures that do not resonate with rotator are required.

Standard fixture with magnetic stand straight and 45°
This standard fixture is for a probe. It has a magnetic stand to use on the granite surface plate. Can adjust the gap to XYZ.

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